Physical principles of optimization of the static regime of a cantilever type power-effect sensor with a constant rectangular cross-section

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Abstract

Abstract - In this paper an analysis of the physical principles of two-criterion optimization Pareto static mode of operation of power sensors cantilever type of rectangular type with a stable cross-section. The proposed criterion based on the Cauchy number is one of the characteristic numbers of the proportional miniaturization of microsystem technology. It is established that for a rectangular cantilever with a stable cross-section, the value of the Cauchy does not depend on the width of the micro-console and the material from which it is made.

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